Media type: E-Article Title: Breakdown and Protection of ALD Moisture Barrier Thin Films Contributor: Nehm, Frederik; Klumbies, Hannes; Richter, Claudia; Singh, Aarti; Schroeder, Uwe; Mikolajick, Thomas; Mönch, Tobias; Hoßbach, Christoph; Albert, Matthias; Bartha, Johann W.; Leo, Karl; Müller-Meskamp, Lars imprint: American Chemical Society (ACS), 2015 Published in: ACS Applied Materials & Interfaces Language: English DOI: 10.1021/acsami.5b06891 ISSN: 1944-8244; 1944-8252 Keywords: General Materials Science Origination: Footnote: