Media type: E-Article Title: Deep Etching of Silicon Based on Metal-Assisted Chemical Etching Contributor: Nur’aini, Anafi; Oh, Ilwhan imprint: American Chemical Society (ACS), 2022 Published in: ACS Omega, 7 (2022) 19, Seite 16665-16669 Language: English DOI: 10.1021/acsomega.2c01113 ISSN: 2470-1343 Origination: Footnote: Access State: Open Access