Media type: E-Article Title: On-Wafer Spectrofluorometric Method for Determination of Relative Quantum Yields of Photoacid Generation in Chemically Amplified Resists Contributor: Feke, Gilbert D.; Grober, Robert D.; Pohlers, Gerd; Moore, Kathryn; Cameron, James F. imprint: American Chemical Society (ACS), 2001 Published in: Analytical Chemistry Language: English DOI: 10.1021/ac0015319 ISSN: 1520-6882; 0003-2700 Keywords: Analytical Chemistry Origination: Footnote: