• Media type: E-Article
  • Title: Controlling the Atomic Layer Deposition of Titanium Dioxide on Silicon: Dependence on Surface Termination
  • Contributor: McDonnell, Stephen; Longo, Roberto C.; Seitz, Oliver; Ballard, Josh B.; Mordi, Greg; Dick, Don; Owen, James H. G.; Randall, John N.; Kim, Jiyoung; Chabal, Yves J.; Cho, Kyeongjae; Wallace, Robert M.
  • imprint: American Chemical Society (ACS), 2013
  • Published in: The Journal of Physical Chemistry C
  • Language: English
  • DOI: 10.1021/jp4060022
  • ISSN: 1932-7447; 1932-7455
  • Keywords: Surfaces, Coatings and Films ; Physical and Theoretical Chemistry ; General Energy ; Electronic, Optical and Magnetic Materials
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