Media type: E-Article Title: Suppression of Acid Diffusion in Chemical Amplification Resists by Molecular Control of Base Matrix Polymers Contributor: Yoshimura, Toshiyuki; Shiraishi, Hiroshi; Okazaki, Shinji Published: IOP Publishing, 1995 Published in: Japanese Journal of Applied Physics, 34 (1995) Part 1, No. 12B, Seite 6786-6793 Language: English DOI: 10.1143/jjap.34.6786 ISSN: 0021-4922; 1347-4065 Keywords: General Physics and Astronomy ; Physics and Astronomy (miscellaneous) ; General Engineering Origination: Footnote: