Media type: E-Article Title: Highly Scalable PVD/CVD-Cobalt Bilayer Salicidation Technology for sub-50nm CMOSFETs Contributor: Yun, Jong-Ho; Kim, Hyun-Su; Jung, Sug-Woo; Jung, Eunji; Kim, Se-Hoon; Kim, B.-H; Choi, Gilheyun; Kim, Sungtae; Chung, U-In; Moon, Joo-Tae imprint: The Electrochemical Society, 2006 Published in: ECS Meeting Abstracts Language: Not determined DOI: 10.1149/ma2005-01/14/684 ISSN: 2151-2043 Keywords: General Medicine Origination: Footnote: Description: <jats:p>Abstract not Available.</jats:p> Access State: Open Access