Media type: E-Article Title: Periodic Nanometric Silicon Surface Patterning Using Direct Wafer Bonding Contributor: Fournel, Frank; Meziere, Jerome; Bavard, Alexis; Eymery, JocL; Gentile, Pascal; Pascale, Alina Published: The Electrochemical Society, 2006 Published in: ECS Meeting Abstracts, MA2005-01 (2006) 2, Seite 68-68 Language: Not determined DOI: 10.1149/ma2005-01/2/68 ISSN: 2151-2043 Keywords: General Medicine Origination: Footnote: Description: Abstract not Available. Access State: Open Access