Research and Development of Non-Contact Spin Processor for Clean Process in Semiconductor-Related-Production System by Applying HTS Magnetic Levitation

Media type: E-Article
Title: Research and Development of Non-Contact Spin Processor for Clean Process in Semiconductor-Related-Production System by Applying HTS Magnetic Levitation
Contributor: Fukui, Satoshi; Kazama, Kyosuke; Sekiya, Syouta; Ogawa, Jun; Oka, Tetsuo; Sato, Takao; Sorimachi, Satoshi; Saito, Kimiyo; Miyazaki, Shinsuke
imprint: Institute of Electrical and Electronics Engineers (IEEE), 2010
Published in: IEEE Transactions on Applied Superconductivity
Language: Not determined
DOI: 10.1109/tasc.2010.2041766
ISSN: 1051-8223; 1558-2515
Keywords: Electrical and Electronic Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials
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