Media type: E-Article Title: High Effective Gummel Number of CVD Boron Layers in Ultrashallow $\hbox{p}^{+}\hbox{n}$ Diode Configurations Contributor: Sarubbi, Francesco; Nanver, Lis K.; Scholtes, Tom L. M. Published: Institute of Electrical and Electronics Engineers (IEEE), 2010 Published in: IEEE Transactions on Electron Devices, 57 (2010) 6, Seite 1269-1278 Language: Without Specification DOI: 10.1109/ted.2010.2045672 ISSN: 0018-9383 Origination: Footnote: