Media type: E-Article Title: Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range Contributor: Frigerio, Paolo; Molinari, Luca; Barbieri, Andrea; Zamprogno, Marco; Mendicino, Gianluca; Boni, Nicolo; Langfelder, Giacomo Published: Institute of Electrical and Electronics Engineers (IEEE), 2023 Published in: IEEE Transactions on Industrial Electronics, 70 (2023) 4, Seite 4217-4225 Language: Not determined DOI: 10.1109/tie.2022.3174235 ISSN: 0278-0046; 1557-9948 Keywords: Electrical and Electronic Engineering ; Control and Systems Engineering Origination: Footnote: