Media type: E-Article Title: A Markov Chain Framework for Cycle Time Approximation of Toolsets Contributor: Akhavan-Tabatabaei, Raha; Fathi, Yahya; Shanthikumar, J. George Published: Institute of Electrical and Electronics Engineers (IEEE), 2012 Published in: IEEE Transactions on Semiconductor Manufacturing, 25 (2012) 4, Seite 589-597 Language: Without Specification DOI: 10.1109/tsm.2012.2202252 ISSN: 0894-6507; 1558-2345 Keywords: Electrical and Electronic Engineering ; Industrial and Manufacturing Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: