• Media type: E-Article
  • Title: Advanced FD-SOI and Beyond Low Temperature SmartCut™ Enables High Density 3-D SoC Applications
  • Contributor: Schwarzenbach, W.; Daval, N.; Maleville, C.; Nguyen, B.-Y.; Ecarnot, L.; Loubriat, S.; Detard, M.; Cela, E.; Bertrand-Giuliani, C.; Chabanne, G.; Maddalon, C.
  • Published: Institute of Electrical and Electronics Engineers (IEEE), 2019
  • Published in: IEEE Journal of the Electron Devices Society, 7 (2019), Seite 863-868
  • Language: Not determined
  • DOI: 10.1109/jeds.2019.2916460
  • ISSN: 2168-6734
  • Keywords: Electrical and Electronic Engineering ; Electronic, Optical and Magnetic Materials ; Biotechnology
  • Origination:
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  • Access State: Open Access