Media type: E-Article Title: Micro-Deflection Methodology for Series Production Tests of MEMS Pressure Sensors Contributor: Binkhoff, Peter; Burchard, Bernd; Hackstein, Detlev Published: Institute of Electrical and Electronics Engineers (IEEE), 2017 Published in: Journal of Microelectromechanical Systems, 26 (2017) 2, Seite 344-350 Language: Not determined DOI: 10.1109/jmems.2016.2631580 ISSN: 1057-7157; 1941-0158 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering Origination: Footnote: