• Media type: E-Article
  • Title: Micro-Deflection Methodology for Series Production Tests of MEMS Pressure Sensors
  • Contributor: Binkhoff, Peter; Burchard, Bernd; Hackstein, Detlev
  • Published: Institute of Electrical and Electronics Engineers (IEEE), 2017
  • Published in: Journal of Microelectromechanical Systems, 26 (2017) 2, Seite 344-350
  • Language: Not determined
  • DOI: 10.1109/jmems.2016.2631580
  • ISSN: 1057-7157; 1941-0158
  • Keywords: Electrical and Electronic Engineering ; Mechanical Engineering
  • Origination:
  • Footnote: