Media type: E-Article Title: Nanometer-Thin Pure Boron Layers as Mask for Silicon Micromachining Contributor: Liu, Xingyu; Nanver, Lis K.; Scholtes, Tom L. M. Published: Institute of Electrical and Electronics Engineers (IEEE), 2017 Published in: Journal of Microelectromechanical Systems, 26 (2017) 6, Seite 1428-1434 Language: Without Specification DOI: 10.1109/jmems.2017.2764322 ISSN: 1941-0158; 1057-7157 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering Origination: Footnote: