Nanver, Lis K.;
Qi, Lin;
Mohammadi, Vahid;
Mok, K. R. M.;
de Boer, Wiebe B.;
Golshani, Negin;
Sammak, Amir;
Scholtes, Thomas L. M.;
Gottwald, Alexander;
Kroth, Udo;
Scholze, Frank
Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility
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Media type:
E-Article
Title:
Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility
Contributor:
Nanver, Lis K.;
Qi, Lin;
Mohammadi, Vahid;
Mok, K. R. M.;
de Boer, Wiebe B.;
Golshani, Negin;
Sammak, Amir;
Scholtes, Thomas L. M.;
Gottwald, Alexander;
Kroth, Udo;
Scholze, Frank
Published:
Institute of Electrical and Electronics Engineers (IEEE), 2014
Published in:
IEEE Journal of Selected Topics in Quantum Electronics, 20 (2014) 6, Seite 306-316