• Media type: E-Article
  • Title: Mid-IR resonant cavity detectors
  • Contributor: O'Loughlin, Trevor A.; Savich, Gregory R.; Sidor, Daniel E.; Marozas, Brendan T.; Golding, Terry D.; Jamison, Keith D.; Fredin, Leif; Fowler, Burt; Priyantha, Weerasinghe; Wicks, Gary W.
  • Published: American Vacuum Society, 2017
  • Published in: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 35 (2017) 2
  • Language: English
  • DOI: 10.1116/1.4977780
  • ISSN: 2166-2746; 2166-2754
  • Keywords: Materials Chemistry ; Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Process Chemistry and Technology ; Instrumentation ; Electronic, Optical and Magnetic Materials
  • Origination:
  • Footnote:
  • Description: Resonant cavity detectors based on III–V materials have been designed, grown entirely by molecular beam epitaxy, fabricated, and tested. They offer a low noise (dark current densities of 0.4 mA/cm2 were measured at 298 K, close to the predicted value of 0.31 mA/cm2), narrow response detector (full width at half maximum of 57 nm in GaSb and 45 nm in InAs) in the mid-infrared region, with future applications in spectroscopy, gas sensing, and optical communications.