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Media type:
E-Article
Title:
New approach for an industrial low-temperature roll-to-roll CI(G)Se hybrid sputter coevaporation deposition process
Contributor:
Weinberger, Nikolaus;
Stock, David;
Kaufmann, Christian Alexander;
Kodalle, Tim;
Heinemann, Marc D.;
Huber, Daniel;
Harnisch, Martina;
Zimmermann, Andreas;
Strauss, Georg N.;
Lackner, Roman
Published:
American Vacuum Society, 2020
Published in:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 38 (2020) 3
Language:
English
DOI:
10.1116/1.5142830
ISSN:
1520-8559;
0734-2101
Origination:
Footnote:
Description:
A new industrial approach for the production of CuInSe2 (CISe) absorber layers in a roll-to-roll process is described. This process is used by Sunplugged GmbH and combines magnetron sputtering with thermal coevaporation. A CISe-based device with a conversion efficiency of more than 10% has been fabricated from absorbers grown on polyimide at low temperature. The characteristic properties of a copper-poor ([Cu]/[In] = 0.73) CISe layer, deposited by Sunplugged's industrial process, are compared to those of a state-of-the-art, more copper-rich ([Cu]/[In] = 0.93) layer, grown in a molecular beam epitaxy system at Helmholtz-Zentrum Berlin. The presence of a so called vacancy-compound in low [Cu]/[In] CISe devices exhibiting an increased bandgap energy is visible by external quantum efficiency measurements, Raman scattering, and scaps simulations.