Media type: E-Article Title: Identification of process parameters for microfabrication with excimer laser Contributor: Agrawal, Vikas Published: SPIE-Intl Soc Optical Eng, 2007 Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS, 6 (2007) 4, Seite 049701 Language: English DOI: 10.1117/1.2795635 ISSN: 1932-5150 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: