Media type: E-Article Title: Applications of model-based transparent surface films analysis using coherence-scanning interferometry Contributor: Fay, Martin F.; Dresel, Thomas imprint: SPIE-Intl Soc Optical Eng, 2017 Published in: Optical Engineering Language: English DOI: 10.1117/1.oe.56.11.111709 ISSN: 0091-3286 Keywords: General Engineering ; Atomic and Molecular Physics, and Optics Origination: Footnote: