• Media type: E-Article
  • Title: Measuring large amplitude surface figure error using coordinate metrology
  • Contributor: Khreishi, Manal; Ohl, Raymond G.; Mcclelland, Ryan; Shiri, Ron; Hewagama, Tilak; Aslam, Shahid; Ulmer, Melville P.; Canavan, Edgar; Liang, Rongguang
  • imprint: SPIE-Intl Soc Optical Eng, 2021
  • Published in: Optical Engineering
  • Language: Not determined
  • DOI: 10.1117/1.oe.60.8.084103
  • ISSN: 0091-3286
  • Keywords: General Engineering ; Atomic and Molecular Physics, and Optics
  • Origination:
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