Media type: E-Article Title: Processing of AlGaAs/GaAs quantum-cascade structures for terahertz laser Contributor: Szerling, Anna; Kosiel, Kamil; Szymanski, Michal; Wasilewski, Zbig; Golaszewska, Krystyna; Laszcz, Adam; Pluska, Mariusz; Trajnerowicz, Artur; Sakowicz, Maciej; Walczakowski, Michal; Palka, Norbert; Jakiela, Rafal; Piotrowska, Anna imprint: SPIE-Intl Soc Optical Eng, 2015 Published in: Journal of Nanophotonics Language: English DOI: 10.1117/1.jnp.9.093079 ISSN: 1934-2608 Keywords: Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: