Media type: E-Article Title: Perspectives of reactive ion etching of silicate glasses for optical microsystems Contributor: Weigel, Christoph; Brokmann, Ulrike; Hofmann, Meike; Behrens, Arne; Rädlein, Edda; Hoffmann, Martin; Strehle, Steffen; Sinzinger, Stefan imprint: SPIE-Intl Soc Optical Eng, 2021 Published in: Journal of Optical Microsystems, 1 (2021) 4 Language: Not determined DOI: 10.1117/1.jom.1.4.040901 ISSN: 2708-5260 Keywords: General Medicine Origination: Footnote: Access State: Open Access