Media type: Electronic Conference Proceeding Title: Absolute shape control of microcomponents using digital holography and multiwavelength contouring Contributor: Osten, Wolfgang; Seebacher, Soenke; Baumbach, Torsten; Jueptner, Werner P. O. imprint: SPIE, 2001 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.429350 ISSN: 0277-786X Origination: Footnote: