• Media type: Electronic Conference Proceeding
  • Title: Design and performance of photoresist materials for ArF lithography
  • Contributor: Kim, Hyun-Woo; Jung, Dong-Won; Lee, Sook; Choi, Sang-Jun; Woo, Sang-Gyun; Kavanagh, Robert J.; Barclay, George G.; Blacksmith, Robert F.; Kang, Doris; Pohlers, Gerd; Cameron, James F.; Mattia, Joe; Caporale, Stefan; Penniman, Thomas; Joesten, Lori A.; Thackeray, James W.
  • imprint: SPIE, 2001
  • Published in: SPIE Proceedings
  • Extent:
  • Language: Not determined
  • DOI: 10.1117/12.436908
  • ISSN: 0277-786X
  • Origination:
  • Footnote: