Media type: Electronic Conference Proceeding Title: Novel micromachined uncooled infrared detector employing a-Si:H TFT as thermosensitive element Contributor: Dong, Liang; Liu, Litian; Yue, Ruifeng Published: SPIE, 2001 Published in: SPIE Proceedings (2001) Extent: Language: Not determined DOI: 10.1117/12.445753 ISSN: 0277-786X Origination: Footnote: