• Media type: Electronic Conference Proceeding
  • Title: Aspheric Surface Fabrication in nm-level Accuracy by Numerically Controlled Plasma Chemical Vaporization Machining (CVM) and Elastic Emission Machining (EEM)
  • Contributor: Yamamura, Kazuya; Mimura, Hidekazu; Yamauchi, Kazuto; Sano, Yasuhisa; Saito, Akira; Kinoshita, Takehiko; Endo, Katsuyoshi; Mori, Yuzo; Souvorov, Alexei; Yabashi, Makina; Tamasaku, Kenji; Ishikawa, Tetsuya
  • imprint: SPIE, 2002
  • Published in: SPIE Proceedings
  • Extent:
  • Language: Not determined
  • DOI: 10.1117/12.453749
  • ISSN: 0277-786X
  • Origination:
  • Footnote: