Media type: Electronic Conference Proceeding Title: New options of holographic metrology Contributor: Steinbichler, Hans Published: SPIE, 1991 Published in: SPIE Proceedings, 1507 (1991), Seite 435-445 Extent: 435-445 Language: Not determined DOI: 10.1117/12.47064 ISSN: 0277-786X Origination: Footnote: