Media type: Electronic Conference Proceeding Title: New PTB reflectometer for the characterization of large optics for the extreme-ultraviolet spectral region Contributor: Tuemmler, Johannes; Scholze, Frank; Brandt, Guido M.; Meyer, Bernd; Scholz, Frank; Vogel, Katrin; Ulm, Gerhard; Poier, Michael; Klein, Udo; Diete, Wolfgang Published: SPIE, 2002 Published in: Emerging Lithographic Technologies VI (2002) Extent: Language: Not determined DOI: 10.1117/12.472307 ISSN: 0277-786X Origination: Footnote: