Media type: Electronic Conference Proceeding Title: New crossbeam inspection tool combining an ultrahigh-resolution field emission SEM and a high-resolution FIB Contributor: Gnauck, Peter; Hoffrogge, Peter; Greiser, Jens imprint: SPIE, 2002 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.473530 ISSN: 0277-786X Origination: Footnote: