Media type: Electronic Conference Proceeding Title: Design of experiments optimization of PMMA for LIGA applications Contributor: Singleton, Laurence; Schenk, Rainer; Haverbeck, Oliver; Tunayer, Abdi; Himmelsbach, Anja; Krempel, Christiana; Detemple, Peter; Lachar, Manfred imprint: SPIE, 2002 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.474195 ISSN: 0277-786X Origination: Footnote: