Media type: Electronic Conference Proceeding Title: 3D-MID and process monitoring for microjoining applications Contributor: Ostendorf, Andreas; Specker, Wilhelm; Stallmach, Matthias; Zeadan, Jeihad imprint: SPIE, 2003 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.478920 ISSN: 0277-786X Origination: Footnote: