Media type: Electronic Conference Proceeding Title: Methods to achieve sub-100-nm contact hole lithography Contributor: Lindsay, Tracy K.; Kavanagh, Robert J.; Pohlers, Gerd; Kanno, Takafumi; Bae, Young C.; Barclay, George G.; Kanagasabapathy, Subbareddy; Mattia, Joseph imprint: SPIE, 2003 Published in: Advances in Resist Technology and Processing XX Extent: Language: Not determined DOI: 10.1117/12.485173 ISSN: 0277-786X Origination: Footnote: