Media type: Electronic Conference Proceeding Title: Novel materials for 157-nm bilayer resist designs Contributor: Dilocker, Stephanie J.; Malik, Sanjay; De, Binod B. Published: SPIE, 2003 Published in: Advances in Resist Technology and Processing XX (2003) Extent: Language: Not determined DOI: 10.1117/12.485207 ISSN: 0277-786X Origination: Footnote: