Media type: Electronic Conference Proceeding Title: SOI-silicon as structural layer for NEMS applications Contributor: Villarroya, Maria; Figueras, Eduard; Perez-Murano, Francesc; Campabadal, Francesca; Esteve, Jaume; Barniol, Nuria Published: SPIE, 2003 Published in: SPIE Proceedings (2003) Extent: Language: Not determined DOI: 10.1117/12.499010 ISSN: 0277-786X Origination: Footnote: