Media type: Electronic Conference Proceeding Title: Application of electron-beam-induced processes to mask repair Contributor: Edinger, Klaus; Boegli, Volker A.; Budach, Michael; Hoinkis, Ottmar; Weyrauch, Bernd; Koops, Hans W. P.; Bihr, Johannes; Greiser, Jens imprint: SPIE, 2003 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.504061 ISSN: 0277-786X Origination: Footnote: