Media type: Electronic Conference Proceeding Title: Electron-beam mask repair with induced reactions Contributor: Koops, Hans W. P.; Edinger, Klaus; Bihr, Johannes; Boegli, Volker A.; Greiser, Jens imprint: SPIE, 2003 Published in: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents Extent: Language: Not determined DOI: 10.1117/12.514972 ISSN: 0277-786X Origination: Footnote: