Media type: Electronic Conference Proceeding Title: Development of a figure correction method having spatial resolution close to 0.1 mm Contributor: Mori, Yuzo; Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu; Sano, Yasuhisa; Saito, Akira; Endo, Katsuyoshi; Souvorov, Alexei; Yabashi, Makina; Tamasaku, Kenji; Ishikawa, Tetsuya imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.520825 ISSN: 0277-786X Origination: Footnote: