Media type: Electronic Conference Proceeding Title: High-power short-pulse laser modules for laser-produced-plasma EUV source Contributor: Ellwi, Samir; Comley, Andrew; Hay, N.; Brownell, Michael imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.534015 ISSN: 0277-786X Origination: Footnote: