Media type: Electronic Conference Proceeding Title: Sapphire tools for laser-assisted microforming Contributor: Wulfsberg, Jens P.; Hilpert, Sven-Eric; Ostendorf, Andreas; Kulik, Christian J.; Temme, Thorsten; Samm, Katja imprint: SPIE, 2003 Published in: Fourth International Symposium on Laser Precision Microfabrication Extent: Language: Not determined DOI: 10.1117/12.541442 ISSN: 0277-786X Origination: Footnote: