Media type: Electronic Conference Proceeding Title: Simulation of technological process of microstructures etching in high-voltage gas discharge plasma Contributor: Kazanskiy, Nikolay L.; Kolpakov, Vsevolod A. imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.562655 ISSN: 0277-786X Origination: Footnote: