Media type: Electronic Conference Proceeding Title: Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam Contributor: Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu; Sano, Yasuhisa; Matsuyama, Satoshi; Yumoto, Hirokatsu; Ueno, Kazumasa; Shibahara, Masafumi; Endo, Katsuyoshi; Yabashi, Makina; Tamasaku, Kenji; Nishino, Yoshinori; Ishikawa, Tetsuya; Mori, Yuzo imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.567501 ISSN: 0277-786X Origination: Footnote: