Media type: Electronic Conference Proceeding Title: Microstitching interferometry for nanofocusing mirror optics Contributor: Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi; Yamamura, Kazuya; Sano, Yasuhisa; Ueno, Kazumasa; Endo, Katsuyoshi; Mori, Yuzo; Yabashi, Makina; Tamasaku, Kenji; Nishino, Yoshinori; Ishikawa, Tetsuya; Yamauchi, Kazuto imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.567511 ISSN: 0277-786X Origination: Footnote: