Media type: Electronic Conference Proceeding Title: Pattern transfer capabilities of CAMP deep-UV resist Contributor: Daraktchiev, Ivan S.; Goossens, Dirk; Matthijs, P.; Thirsk, Mark; Blakeney, Andrew J.; Nalamasu, Omkaram; Cheng, May imprint: SPIE, 1992 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.59748 ISSN: 0277-786X Origination: Footnote: