Media type: Electronic Conference Proceeding Title: Scatter analysis of optical components from 193 nm to 13.5 nm Contributor: Schroeder, Sven; Kamprath, Mathias; Gliech, Stefan; Duparre, Angela imprint: SPIE, 2005 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.616423 ISSN: 0277-786X Origination: Footnote: