Media type: Electronic Conference Proceeding Title: Mask data volume: explosion or damp squib? Contributor: Spence, Chris; Goad, Scott; Buck, Peter; Gladhill, Richard; Cinque, Russell imprint: SPIE, 2005 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.629369 ISSN: 0277-786X Origination: Footnote: