Media type: Electronic Conference Proceeding Title: In quest of predictive lithography simulation Contributor: Kalus, Christian K.; Buß, Hinderk M.; Brooker, Peter D. imprint: SPIE, 2006 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.654770 ISSN: 0277-786X Origination: Footnote: