Media type: Electronic Conference Proceeding Title: Defects, overlay, and focus performance improvements with five generations of immersion exposure systems Contributor: Mulkens, Jan; Streefkerk, Bob; Jasper, Hans; de Klerk, Jos; de Jong, Fred; Levasier, Leon; Leenders, Martijn imprint: SPIE, 2007 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.713577 ISSN: 0277-786X Origination: Footnote: