Media type: Electronic Conference Proceeding Title: Ultraprecision micromilling of freeform optical elements for planar microoptical systems integration Contributor: Stoebenau, Sebastian; Amberg, Martin; Sinzinger, Stefan Published: SPIE, 2008 Published in: Micro-Optics 2008 (2008) Extent: Language: Not determined DOI: 10.1117/12.780310 ISSN: 0277-786X Origination: Footnote: