Media type: Electronic Conference Proceeding Title: Phame: phase measurements on 45nm node phase shift features Contributor: Buttgereit, Ute; Birkner, Robert; Seidel, Dirk; Perlitz, Sascha; Philipsen, Vicky; De Bisschop, Peter imprint: SPIE, 2008 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.793105 ISSN: 0277-786X Origination: Footnote: