Media type: Electronic Conference Proceeding Title: Model-free and model-based methods for dimensional metrology during the lifetime of a product Contributor: Weidner, Peter; Kasic, Alexander; Hingst, Thomas; Ehlers, Carsten; Philipp, Sylke; Marschner, Thomas; Moert, Manfred Published: SPIE, 2008 Published in: SPIE Proceedings (2008) Extent: Language: Not determined DOI: 10.1117/12.814534 ISSN: 0277-786X Origination: Footnote: